ASTM F1711-1996(2008) 使用四点探测法测定专业平板显示器用薄膜导线的薄膜电阻的标准实施规程

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【英文标准名称】:StandardPracticeforMeasuringSheetResistanceofThinFilmConductorsforFlatPanelDisplayManufacturingUsingaFour-PointProbeMethod
【原文标准名称】:使用四点探测法测定专业平板显示器用薄膜导线的薄膜电阻的标准实施规程
【标准号】:ASTMF1711-1996(2008)
【标准状态】:现行
【国别】:美国
【发布日期】:1996
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.17
【标准类型】:(Practice)
【标准水平】:()
【中文主题词】:
【英文主题词】:electricalresistance;electricalsheetresistance;flatpaneldisplays;fourpointprobe;resistance;sputteredthinfilms;thinconductivefilmsonglass;thinfilms
【摘要】:1.1Thispracticedescribesmethodsformeasuringthesheetelectricalresistanceofsputteredthinconductivefilmsdepositedonlargeinsulatingsubstrates,usedinmakingflatpanelinformationdisplays.Itisassumedthatthethicknessoftheconductivethinfilmismuchthinnerthanthespacingofthecontactprobesusedtomeasurethesheetresistance.1.2ThisstandardisintendedtobeusedwithTestMethodF390.1.3Sheetresistivityintherange0.5to5000ohmspersquaremaybemeasuredbythispractice.Thesheetresistanceisassumeduniformintheareabeingprobed.1.4Thispracticeisapplicabletoflatsurfacesonly.1.5Probepinspacingsof1.5mmto5.0mm,inclusive(0.059to0.197ininclusive)arecoveredbythispractice.1.6Themethodinthispracticeispotentiallydestructivetothethinfilmintheimmediateareainwhichthemeasurementismade.Areastestedshouldthusbecharacteristicofthefunctionalpartofthesubstrate,butshouldberemotefromcriticalactiveregions.Themethodissuitableforcharacterizingdummytestsubstratesprocessedatthesametimeassubstratesofinterest.1.7ThevaluesstatedinSIunitsaretoberegardedasthestandard.Thevaluesgiveninparenthesesareforinformationonly.1.8Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:L90
【国际标准分类号】:31_120
【页数】:9P.;A4
【正文语种】:英语